Hafnium Oxide Nanostructured Thin Films: Electrophoretic Deposition Process and DUV Photolithography Patterning.

ABSTRACT: In the frame of the nanoarchitectonic concept, the objective of this study was to develop simple and easy methods to ensure the preparation of polymorphic HfO₂ thin film materials (<200 nm) having the best balance of patterning potential, reproducibility and stability to be used in optical, sensing or electronic fields. The nanostructured HfO₂ thin films with micropatterns or continuous morphologies were synthesized by two different methods, i.e., the micropatterning of sol-gel solutions by deep ultraviolet (DUV) photolithography or the electrophoretic deposition (EPD) of HfO₂ nanoparticles (HfO_2-NPs). Amorphous and monoclinic HfO₂ micropatterned nanostructured thin films (HfO_2-DUV) were prepared by using a sol-gel soluti

SUBMITTER: Proust V 

PROVIDER: S-EPMC9320788 | biostudies-literature | 2022 Jul

REPOSITORIES: biostudies-literature