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ABSTRACT:
SUBMITTER: Seguini G
PROVIDER: S-EPMC9344376 | biostudies-literature | 2022 Jul
REPOSITORIES: biostudies-literature
Seguini Gabriele G Motta Alessia A Bigatti Marco M Caligiore Federica E FE Rademaker Guido G Gharbi Ahmed A Tiron Raluca R Tallarida Graziella G Perego Michele M Cianci Elena E
ACS applied nano materials 20220705 7
Nanostructured organic templates originating from self-assembled block copolymers (BCPs) can be converted into inorganic nanostructures by sequential infiltration synthesis (SIS). This capability is particularly relevant within the framework of advanced lithographic applications because of the exploitation of the BCP-based nanostructures as hard masks. In this work, Al<sub>2</sub>O<sub>3</sub> dot and antidot arrays were synthesized by sequential infiltration of trimethylaluminum and water precu ...[more]