Ontology highlight
ABSTRACT:
SUBMITTER: Abbasalipour A
PROVIDER: S-EPMC9345908 | biostudies-literature | 2022
REPOSITORIES: biostudies-literature
Abbasalipour Amin A Palit Prithviraj P Sheikhlari Sepehr S Pakdelian Siavash S Pourkamali Siavash S
Microsystems & nanoengineering 20220803
This work presents a new class of micromachined electrostatic actuators capable of producing output force and displacement unprecedented for MEMS electrostatic actuators. The actuators feature submicron high aspect ratio transduction gaps lined up in two-dimensional arrays. Such an arrangement of microscale actuator cells allows the addition of force and displacements of a large number of cells (up to 7600 in one demonstrated array), leading to displacements ranging in the hundreds of microns an ...[more]