Fabrication of Silicon Nanowire Sensors for Highly Sensitive pH and DNA Hybridization Detection.

ABSTRACT: A highly sensitive silicon nanowire (SiNW)-based sensor device was developed using electron beam lithography integrated with complementary metal oxide semiconductor (CMOS) technology. The top-down fabrication approach enables the rapid fabrication of device miniaturization with uniform and strictly controlled geometric and surface properties. This study demonstrates that SiNW devices are well-aligned with different widths and numbers for pH sensing. The device consists of a single nanowire with 60 nm width, exhibiting an ideal pH responsivity (18.26 × 10⁶ Ω/pH), with a good linear relation between the electrical response and a pH level range of 4-10. The optimized SiNW device is employed to detect specific single-stranded deoxyribonucleic acid (ssDNA) molecules. To use the sensi

SUBMITTER: Abd Rahman SF 

PROVIDER: S-EPMC9370444 | biostudies-literature | 2022 Aug

REPOSITORIES: biostudies-literature