On the Electron-Induced Reactions of (CH₃)AuP(CH₃)₃: A Combined UHV Surface Science and Gas-Phase Study.

ABSTRACT: Focused-electron-beam-induced deposition (FEBID) is a powerful nanopatterning technique where electrons trigger the local dissociation of precursor molecules, leaving a deposit of non-volatile dissociation products. The fabrication of high-purity gold deposits via FEBID has significant potential to expand the scope of this method. For this, gold precursors that are stable under ambient conditions but fragment selectively under electron exposure are essential. Here, we investigated the potential gold precursor (CH₃)AuP(CH₃)₃ using FEBID under ultra-high vacuum (UHV) and spectroscopic characterization of the corresponding metal-containing deposits. For a detailed insight into electron-induced fragmentation, the deposit's composition was compared with the frag

SUBMITTER: Kamali A 

PROVIDER: S-EPMC9370483 | biostudies-literature | 2022 Aug

REPOSITORIES: biostudies-literature