Sub-Nanometer Electron Beam Phase Patterning in 2D Materials.

ABSTRACT: Phase patterning in polymorphic two-dimensional (2D) materials offers diverse properties that extend beyond what their pristine structures can achieve. If precisely controllable, phase transitions can bring exciting new applications for nanometer-scale devices and ultra-large-scale integrations. Here, the focused electron beam is capable of triggering the phase transition from the semiconducting T'' phase to metallic T' and T phases in 2D rhenium disulfide (ReS₂ ) and rhenium diselenide (ReSe₂ ) monolayers, rendering ultra-precise phase patterning technique even in sub-nanometer scale is found. Based on knock-on effects and strain analysis, the phase transition mechanism on the created atomic vacancies and the introduced substantial in-plane compressive strain in 2D l

SUBMITTER: Zheng F 

PROVIDER: S-EPMC9376820 | biostudies-literature | 2022 Aug

REPOSITORIES: biostudies-literature