Fluorinated β-diketonate complexes M(tfac)₂(TMEDA) (M = Fe, Ni, Cu, Zn) as precursors for the MOCVD growth of metal and metal oxide thin films.

ABSTRACT: Partially fluorinated β-diketonate complexes M(tfac)₂(TMEDA) (M = Fe 1, Ni 2, Cu 3, Zn 4; tfac = 1,1,1-trifluoro-2,4-pentanedionate; TMEDA = N,N,N',N'-tetramethylethylenediamine) were synthesized and structurally (sc-XRD) and thermochemically (TGA) characterised. A new polymorph of Fe(tfac)₂(TMEDA) was found. The structural and physicochemical properties of 1-4 were compared with related M(acac)₂(TMEDA) and M(hfac)₂(TMEDA) (acac = 2,4-pentanedionate, hfac = 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate) β-diketonate complexes to evaluate the effect of the degree of fluorination. A positive effect on the thermal behaviour of the metal acetylacetonates was observed, but no discernible trends. Application of complexes 1-4 as

SUBMITTER: Stienen C 

PROVIDER: S-EPMC9379779 | biostudies-literature | 2022 Aug

REPOSITORIES: biostudies-literature