Femtosecond Laser Fabrication of Submillimeter Microlens Arrays with Tunable Numerical Apertures.

ABSTRACT: In recent years, the demand for optical components such as microlenses has been increasing, and various methods have been developed. However, fabrication of submillimeter microlenses with tunable numerical aperture (NA) on hard and brittle materials remains a great challenge using the current methods. In this work, we fabricated a variable NA microlens array with submillimeter size on a silica substrate, using a femtosecond laser-based linear scanning-assisted wet etching method. At the same time, the influence of various processing parameters on the microlens morphology and NA was studied. The NA of the microlenses could be flexibly adjusted in the range of 0.2 to 0.45 by changing the scanning distance of the laser and assisted wet etching. In addition, the imaging and focusing performanc

SUBMITTER: Yang T 

PROVIDER: S-EPMC9414556 | biostudies-literature | 2022 Aug

REPOSITORIES: biostudies-literature