Design and Characterization of a Planar Micro-Conveyor Device Based on Cooperative Legged Piezoelectric MEMS Resonators.

ABSTRACT: This paper reports the design, fabrication, and performance of a hybrid piezoelectric planar micro-conveyor based on Micro-Electromechanical Systems (MEMS) bridge resonators and featuring 3D-printed vertical legs. The device includes two cooperating silicon plate resonators with an area of 5 × 1 mm², actuated by an integrated aluminum-nitride (AlN) piezoelectric thin film. An optimally designed array of 3D-printed projection legs was attached to the plates, to convert the standing-wave (SW) vertical vibrations into horizontal rotations or translations of the supported slider. An open-loop control strategy based on burst-type driving signals, with different numbers of sinusoidal cycles applied on each of the resonators, allowed the cooperation of the two bridges to set up prescri

SUBMITTER: Ruiz-Diez V 

PROVIDER: S-EPMC9415132 | biostudies-literature | 2022 Jul

REPOSITORIES: biostudies-literature