Tailoring the crystal growth of quartz on silicon for patterning epitaxial piezoelectric films.

ABSTRACT: Epitaxial films of piezoelectric α-quartz could enable the fabrication of sensors with unprecedented sensitivity for prospective applications in electronics, biology and medicine. However, the prerequisites are harnessing the crystallization of epitaxial α-quartz and tailoring suitable film microstructures for nanostructuration. Here, we bring new insights into the crystallization of epitaxial α-quartz films on silicon (100) from the devitrification of porous silica and the control of the film microstructures: we show that by increasing the quantity of devitrifying agent (Sr) it is possible to switch from an α-quartz microstructure consisting of a porous flat film to one dominated by larger, fully dense α-quartz crystals. We also found that the film thickness, relative humidity and the nat

SUBMITTER: Zhang Q 

PROVIDER: S-EPMC9419616 | biostudies-literature | 2019 Sep

REPOSITORIES: biostudies-literature