Molybdenum(IV) dithiocarboxylates as single-source precursors for AACVD of MoS₂ thin films.

ABSTRACT: Tetrakis(dithiocarboxylato)molybdenum(IV) complexes of the type Mo(S₂CR)₄ (R = Me, Et, ⁱPr, Ph) were synthesized, characterized, and prescreened as precursors for aerosol assisted chemical vapor deposition (AACVD) of MoS₂ thin films. The thermal behavior of the complexes as determined by TGA and GC-MS was appropriate for AACVD, although the complexes were not sufficiently volatile for conventional CVD bubbler systems. Thin films of MoS₂ were grown by AACVD at 500 °C from solutions of Mo(S₂CMe)₄ in toluene. The films were characterized by GIXRD diffraction patterns which correspond to a 2H-MoS₂ structure in the deposited film. Mo-S bonding in 2H-MoS₂ was further confirmed by XPS and EDS

SUBMITTER: Muhammad S 

PROVIDER: S-EPMC9426634 | biostudies-literature | 2022 Aug

REPOSITORIES: biostudies-literature