Tuning of silicon nitride micro-cavities by controlled nanolayer deposition.

ABSTRACT: Integration of single-photon emitters (SPEs) with resonant photonic structures is a promising approach for realizing compact and efficient single-photon sources for quantum communications, computing, and sensing. Efficient interaction between the SPE and the photonic cavity requires that the cavity's resonance matches the SPE's emission line. Here we demonstrate a new method for tuning silicon nitride (Si₃N₄) microring cavities via controlled deposition of the cladding layers. Guided by numerical simulations, we deposit silicon dioxide (SiO₂) nanolayers onto Si₃N₄ ridge structures in steps of 50 nm. We show tuning of the cavity resonance exceeding a free spectral range (FSR) of 3.5 nm without degradation of the quality-factor (Q-factor

SUBMITTER: Kalashnikov DA 

PROVIDER: S-EPMC9445027 | biostudies-literature | 2022 Sep

REPOSITORIES: biostudies-literature