Scalable and Tunable Diamond Nanostructuring Process for Nanoscale NMR Applications.

ABSTRACT: Nanostructuring of a bulk material is used to change its mechanical, optical, and electronic properties and to enable many new applications. We present a scalable fabrication technique that enables the creation of densely packed diamond nanopillars for quantum technology applications. The process yields tunable feature sizes without the employment of lithographic techniques. High-aspect-ratio pillars are created through oxygen-plasma etching of diamond with a dewetted palladium film as an etch mask. We demonstrate an iterative renewal of the palladium etch mask, by which the initial mask thickness is not the limiting factor for the etch depth. Following the process, 300-400 million densely packed 100 nm wide and 1 μm tall diamond pillars were created on a 3 × 3 mm² diamond sampl

SUBMITTER: Gierse M 

PROVIDER: S-EPMC9454277 | biostudies-literature | 2022 Sep

REPOSITORIES: biostudies-literature