Piezoresistance Characterization of Silicon Nanowires in Uniaxial and Isostatic Pressure Variation.

ABSTRACT: Silicon nanowires (SiNWs) are known to exhibit a large piezoresistance (PZR) effect, making them suitable for various sensing applications. Here, we report the results of a PZR investigation on randomly distributed and interconnected vertical silicon nanowire arrays as a pressure sensor. The samples were produced from p-type (100) Si wafers using a silver catalyzed top-down etching process. The piezoresistance response of these SiNW arrays was analyzed by measuring their I-V characteristics under applied uniaxial as well as isostatic pressure. The interconnected SiNWs exhibit increased mechanical stability in comparison with separated or periodic nanowires. The repeatability of the fabrication process and statistical distribution of measurements were also tested on several samples from dif

SUBMITTER: Fakhri E 

PROVIDER: S-EPMC9459738 | biostudies-literature | 2022 Aug

REPOSITORIES: biostudies-literature