Effects of precursor pre-treatment on the vapor deposition of WS₂ monolayers.

ABSTRACT: Transition metal oxide powders have been widely used as the growth precursors for monolayer transition metal dichalcogenides (TMDCs) in chemical vapor deposition (CVD). It has been proposed that metal oxide precursors in the gas phase undergo a two-step reaction during CVD growth, where transition metal sub-oxides are likely formed first and then the sulfurization of these sub-oxides leads to the formation of TMDCs. However, the effects of stoichiometry of transition metal oxide precursors on the growth of TMDC monolayers have not been studied yet. In this contribution, we report the critical role of the WO₃ precursor pre-annealing process on the growth of WS₂ monolayers. Besides, several WO₃ precursors with different types of oxygen vacancies have also bee

SUBMITTER: Pam ME 

PROVIDER: S-EPMC9473267 | biostudies-literature | 2019 Mar

REPOSITORIES: biostudies-literature