Modeling effective thermal conductivity enhanced by surface waves using the Boltzmann transport equation.

ABSTRACT: The thermal management of semiconductors at the device level has become a crucial issue owing to the high integration density and miniaturization of microelectronic systems. Because surface phonon polaritons (SPhPs) exhibit long propagation lengths, they are expected to contribute significantly to the heat dissipation in microelectronic systems. This study aims to numerically estimate the heat transfer due to SPhPs in a thin SiO₂ film. The one-dimensional Boltzmann transport equation (BTE) is solved using the estimated propagation length based on the SPhP dispersion curves. The temperature profiles and heat fluxes are predicted and demonstrate the size effect of the film on the effective in-plane thermal conductivity of the SiO₂ film. The results indicate that the tem

SUBMITTER: Yun KH 

PROVIDER: S-EPMC9474515 | biostudies-literature | 2022 Sep

REPOSITORIES: biostudies-literature