Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers.

ABSTRACT: This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes. They were applied to fabricate high yield CMOS-MEMS shielded Lorentz-force magnetometers (LFM). The multilayered metals and oxides of the back-end-of-line (BEOL), normally used for electronic routing, comprise the structural part of the MEMS. The most important fabrication challenges, modeling approaches and design solutions are discussed. Equations that predict the Q factor, sensitivity, Brownian noise and resonant frequency as a function of temperature, gas pressure and design parameters are presented and validated in characterization tests. A number of the fabricated magnetometers were packaged into Quad Flat No-lea

SUBMITTER: Valle JJ 

PROVIDER: S-EPMC9481614 | biostudies-literature | 2022

REPOSITORIES: biostudies-literature