Occupational Exposure to Refractory Ceramic Fibers in the Semiconductor Scrubber Manufacturing Industry.

ABSTRACT:

Background

Refractory ceramic fibers (RCFs) are a suspected carcinogen but have been widely used as insulations. Depending on the temperature, RCFs can transform into crystalline SiO₂, which is a carcinogen that can be present in the air during bulk RCF handling. This study analyzed the physicochemical and morphological characteristics of RCFs at high temperatures and determined the exposure levels during the semiconductor scrubber maintenance.

Methods

Sampling was conducted at a company that manufactures semiconductor scrubbers using RCFs as insulation. Bulk RCF samples were collected both before and after exposure to a scrubber temperature of 700°C. Airborne RCFs were collected during scrubber maintenance, and their characteristics were analyzed using microscope

SUBMITTER: Song S 

PROVIDER: S-EPMC9482015 | biostudies-literature | 2022 Sep

REPOSITORIES: biostudies-literature