Facilitating Uniform Large-Scale MoS₂, WS₂ Monolayers, and Their Heterostructures through van der Waals Epitaxy.

ABSTRACT: The fabrication process for the uniform large-scale MoS₂, WS₂ transition-metal dichalcogenides (TMDCs) monolayers, and their heterostructures has been developed by van der Waals epitaxy (VdWE) through the reaction of MoCl₅ or WCl₆ precursors and the reactive gas H₂S to form MoS₂ or WS₂ monolayers, respectively. The heterostructures of MoS₂/WS₂ or WS₂/MoS₂ can be easily achieved by changing the precursor from WCl₆ to MoCl₅ once the WS₂ monolayer has been fabricated or switching the precursor from MoCl₅ to WCl₆ after the MoS₂ monolayer has been deposited on the substrate. These VdWE-grown MoS₂, WS

SUBMITTER: Huang CC 

PROVIDER: S-EPMC9501908 | biostudies-literature | 2022 Sep

REPOSITORIES: biostudies-literature