Lifetime and Stability of Silicon Nitride Nanopores and Nanopore Arrays for Ionic Measurements.

ABSTRACT: Nanopores are promising for many applications including DNA sequencing and molecular filtration. Solid-state nanopores are preferable over their biological counterparts for applications requiring durability and operation under a wider range of external parameters, yet few studies have focused on optimizing their robustness. We report the lifetime and durability of pores and porous arrays in 10 to 100 nm-thick, low-stress silicon nitride (SiN_x) membranes. Pores are fabricated using a transmission electron microscope (TEM) and/or electron beam lithography (EBL) and reactive ion etching (RIE), with diameters from 2 to 80 nm. We store them in various electrolyte solutions (KCl, LiCl, MgCl₂) and record open pore conductance over months to quantify pore stability. Po

SUBMITTER: Chou YC 

PROVIDER: S-EPMC9547353 | biostudies-literature | 2020 Jun

REPOSITORIES: biostudies-literature