A Highly Sensitive and Flexible Capacitive Pressure Sensor Based on Alignment Airgap Dielectric.

ABSTRACT: Flexible capacitive pressure sensors with a simple structure and low power consumption are attracting attention, owing to their wide range of applications in wearable electronic devices. However, it is difficult to manufacture pressure sensors with high sensitivity, wide detection range, and low detection limits. We developed a highly sensitive and flexible capacitive pressure sensor based on the porous Ecoflex, which has an aligned airgap structure and can be manufactured by simply using a mold and a micro-needle. The existence of precisely aligned airgap structures significantly improved the sensor sensitivity compared to other dielectric structures without airgaps. The proposed capacitive pressure sensor with an alignment airgap structure supports a wide range of working pressures (20-1

SUBMITTER: Kim SW 

PROVIDER: S-EPMC9571520 | biostudies-literature | 2022 Sep

REPOSITORIES: biostudies-literature