Structural, optical, and magnetic properties of Ag⁺, Mn⁺ and Ar⁺ ions implanted ZnO thin films: effect of implantation dose and stopping energy.

ABSTRACT: Herein, we systematically studied the effect of various excitation processes on the structural, optical, and magnetic properties of ZnO films implanted with 80 keV Ar⁺, 110 keV Mn⁺, and 190 keV Ag⁺ ions. Four different doses of 1 × 10¹³, 1 × 10¹⁴, 1 × 10¹⁵, and 2 × 10¹⁶ ions per cm² were used for implantation. It was observed that the structural, optical, and magnetic properties of the implanted samples were dominantly affected at the highest dose of 2 × 10¹⁶ ions per cm². For lower doses, insignificant changes in these properties were observed. A comparison of various processes involved in the implantation process shows that both the electronic excitation and nuclear excitation pr

SUBMITTER: Lim WC 

PROVIDER: S-EPMC9577707 | biostudies-literature | 2022 Oct

REPOSITORIES: biostudies-literature