AFM Study of Roughness Development during ToF-SIMS Depth Profiling of Multilayers with a Cs⁺ Ion Beam in a H₂ Atmosphere.

ABSTRACT: The influence of H₂ flooding on the development of surface roughness during time-of-flight secondary ion mass spectrometry (ToF-SIMS) depth profiling was studied to evaluate the different aspects of a H₂ atmosphere in comparison to an ultrahigh vacuum (UHV) environment. Multilayer samples, consisting of different combinations of metal, metal oxide, and alloy layers of different elements, were bombarded with 1 and 2 keV Cs⁺ ion beams in UHV and a H₂ atmosphere of 7 × 10^-7 mbar. The surface roughness S_a was measured with atomic force microscopy (AFM) on the initial surface and in the craters formed while sputtering, either in the middle of the layers or at the interfaces. We found that the roughness after Cs⁺

SUBMITTER: Ekar J 

PROVIDER: S-EPMC9609309 | biostudies-literature | 2022 Oct

REPOSITORIES: biostudies-literature