Rapid Fabrication of Low-Cost Thermal Bubble-Driven Micro-Pumps.

ABSTRACT: Thermal bubble-driven micro-pumps are an upcoming actuation technology that can be directly integrated into micro/mesofluidic channels to displace fluid without any moving parts. These pumps consist of high power micro-resistors, which we term thermal micro-pump (TMP) resistors, that locally boil fluid at the resistor surface in microseconds creating a vapor bubble to perform mechanical work. Conventional fabrication approaches of thermal bubble-driven micro-pumps and associated microfluidics have utilized semiconductor micro-fabrication techniques requiring expensive tooling with long turn around times on the order of weeks to months. In this study, we present a low-cost approach to rapidly fabricate and test thermal bubble-driven micro-pumps with associated microfluidics utilizing commer

SUBMITTER: Hayes B 

PROVIDER: S-EPMC9610814 | biostudies-literature | 2022 Sep

REPOSITORIES: biostudies-literature