Transparent and conducting boron doped ZnO thin films grown by aerosol assisted chemical vapor deposition.

ABSTRACT: ZnO based transparent conducting oxides are important as they provide an alternative to the more expensive Sn : In₂O₃ that currently dominates the industry. Here, we investigate B-doped ZnO thin films grown via aerosol assisted chemical vapour deposition. B : ZnO films were produced from zinc acetate and triethylborane using either tetrahydrofuran or methanol (MeOH) as the solvent. The lowest resistivity of 5.1 × 10^-3 Ω cm along with a visible light transmittance of ∼75-80% was achieved when using MeOH as the solvent. XRD analysis only detected the wurtzite phase of ZnO suggesting successful solid solution formation with B³⁺ substituting Zn²⁺ sites in the lattice. Refinement of the XRD patterns showed minimal distortion to the Z

SUBMITTER: Zhao D 

PROVIDER: S-EPMC9671099 | biostudies-literature | 2022 Nov

REPOSITORIES: biostudies-literature