Ultra-low detection limit chemoresistive NO₂ gas sensor using single transferred MoS₂ flake: an advanced nanofabrication.

ABSTRACT: In this work, a method of fabricating a NO₂ nano-sensor working at room temperature with a low detectable concentration limit is proposed. A 2D-MoS₂ flake is isolated by transferring a single MoS₂ flake to SiO₂/Si substrate, followed by applying an advanced e-beam lithography (EBL) to form a metal contact with Au/Cr electrodes. The resulting chemoresistive nano-sensor using a single MoS₂ flake was applied to detect a very low concentration of NO₂ at the part-per-billion (ppb) level. This result is obtained due to the ability to create microscopic nano-sized MoS₂ gaps using e-beam lithography (300 nm-400 nm). Experimental results also show that the sensor can capture changes in concentration and send the informatio

SUBMITTER: Hong HS 

PROVIDER: S-EPMC9679951 | biostudies-literature | 2022 Nov

REPOSITORIES: biostudies-literature