High thermal conductivity in wafer-scale cubic silicon carbide crystals.

ABSTRACT: High thermal conductivity electronic materials are critical components for high-performance electronic and photonic devices as both active functional materials and thermal management materials. We report an isotropic high thermal conductivity exceeding 500 W m^-1K^-1 at room temperature in high-quality wafer-scale cubic silicon carbide (3C-SiC) crystals, which is the second highest among large crystals (only surpassed by diamond). Furthermore, the corresponding 3C-SiC thin films are found to have record-high in-plane and cross-plane thermal conductivity, even higher than diamond thin films with equivalent thicknesses. Our results resolve a long-standing puzzle that the literature values of thermal conductivity for 3C-SiC are lower than the structurally more complex 6H-S

SUBMITTER: Cheng Z 

PROVIDER: S-EPMC9684120 | biostudies-literature | 2022 Nov

REPOSITORIES: biostudies-literature