High-Resolution Femtosecond Laser-Induced Carbon and Ag Hybrid Structure for Bend Sensing.

ABSTRACT: Miniaturized resistance-based portable bending sensors have been widely used for human health monitoring in recent years. Their sensitivities are defined by their resistance variations (ΔR/R), which strongly rely on the conductivity and minimum line width of the sensing unit. Laser-induced carbonization is a fast and simple method to fabricate porous-sensing structures. However, the fabrication resolution of conductive and deformation-sensitive structures is limited by the thermal effect of commonly used laser sources. With the assistance of femtosecond laser temporal shaping, plasma ejection confinement, and silver nitrate doping, the sheet resistance of the sensing structure was improved from 15 to 0.0004 Ω/□. A thin line with a lateral resolution of 6.5 μm is fabricated as

SUBMITTER: Hong Q 

PROVIDER: S-EPMC9685746 | biostudies-literature | 2022 Nov

REPOSITORIES: biostudies-literature