Thermodynamic Analysis of Group-III-Nitride Alloying with Yttrium by Hybrid Chemical Vapor Deposition.

ABSTRACT: Group-IIIb-transition-metal-alloyed wurtzite Group-IIIa-nitride (IIIb-IIIa-N) thin films have higher piezoelectric characteristics than binary IIIa-N for a broad range of applications in photonic, electronic, sensing, and energy harvesting systems. We perform theoretical thermodynamic analysis for the deposition and epitaxial growth of Y-alloyed GaN and AlN films by a newly introduced growth technique of hybrid chemical vapor deposition (HybCVD), which can overcome the limitations of the conventional techniques. We investigate the equilibrium vapor pressures in the source zones to determine the dominant precursors of cations for the input of the mixing zone. Then, we study the driving force for the vapor-solid phase reactions of cation precursors in the growth zone to calculate the relatio

SUBMITTER: Moradnia M 

PROVIDER: S-EPMC9698282 | biostudies-literature | 2022 Nov

REPOSITORIES: biostudies-literature