Miniaturized structured illumination microscopy using two 3-axis MEMS micromirrors.

ABSTRACT: We present the development and performance characterisation of a novel structured illumination microscope (SIM) in which the grating pattern is generated using two optical beams controlled via 2 micro-electro-mechanical system (MEMS) three-axis scanning micromirrors. The implementation of MEMS micromirrors to accurately and repeatably control angular, radial and phase positioning delivers flexible control of the fluorescence excitation illumination, with achromatic beam delivery through the same optical path, reduced spatial footprint and cost-efficient integration being further benefits. Our SIM architecture enables the direct implementation of multi-color imaging in a compact and adaptable package. The two-dimensional SIM system approach is enabled by a pair of 2 mm aperture electrostati

SUBMITTER: Tinning P 

PROVIDER: S-EPMC9774859 | biostudies-literature | 2022 Dec

REPOSITORIES: biostudies-literature