Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity.

ABSTRACT: This work reports on an innovative dewetting process of silver thin films to realize percolative nanoparticle arrays (NPAs) and demonstrates its application on highly sensitive pressure sensors. The dewetting process, which is a simple and promising technique, synthesizes NPAs by breaking the as-deposited metal film into randomly distributed islands. The NPA properties, such as the mean particle size and the spacing between adjacent particles, can be easily tailored by controlling the dewetting temperature, as well as the as-deposited metal-film thickness. The fabricated NPAs were employed to develop gauge pressure sensors with high sensitivity. The proposed sensor consists of a sealed reference-pressure cavity, a polyimide (PI) membrane patterned with an interdigital electrode pair (IEP),

SUBMITTER: Cho CY 

PROVIDER: S-EPMC9823326 | biostudies-literature | 2022 Dec

REPOSITORIES: biostudies-literature