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A tactile and airflow motion sensor based on flexible double-layer magnetic cilia.

ABSTRACT: Inspired by the concept of bionics, a tactile and airflow motion sensor based on flexible double-layer magnetic cilia is developed, showing extremely high sensitivity in both force and airflow detection. The upper layer of the magnetic cilia is a flexible material mixed with magnetic particles, while the lower layer is a pure flexible material. This double-layer structure significantly improves magnetism while maintaining cilia flexibility. In addition, a metal tube pressing (MTP) method is proposed to overcome the difficulties in preparing large aspect ratio (over 30:1) cilia, offering simplicity and avoiding the use of large-scale MEMS instruments. The developed sensor has a detection range between 0 and 60 µN with a resolution of 2.1 µN for micro forces. It also shows great detection ability for airflow velocity with a sensitivity of 1.43 µT/(m/s). Experiments show that the sensor could be applied in surface roughness characterization and sleep apnea monitoring.

SUBMITTER: Man J

PROVIDER: S-EPMC9845383 | biostudies-literature | 2023

REPOSITORIES: biostudies-literature

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A tactile and airflow motion sensor based on flexible double-layer magnetic cilia.

Man Jiandong J Zhang Junjie J Chen Guangyuan G Xue Ning N Chen Jiamin J

Microsystems & nanoengineering 20230117

Inspired by the concept of bionics, a tactile and airflow motion sensor based on flexible double-layer magnetic cilia is developed, showing extremely high sensitivity in both force and airflow detection. The upper layer of the magnetic cilia is a flexible material mixed with magnetic particles, while the lower layer is a pure flexible material. This double-layer structure significantly improves magnetism while maintaining cilia flexibility. In addition, a metal tube pressing (MTP) method is prop ...[more]

PMID: 36688091

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