Observation of plasma inflows in laser-produced Sn plasma and their contribution to extreme-ultraviolet light output enhancement.

ABSTRACT: Plasma dynamics are governed by electron density (n_e), electron temperature (T_e), and radiative energy transfer as well as by macroscopic flows. However, plasma flow-velocity fields (v_flow) inside laser-produced plasmas (LPPs) have rarely been measured, owing to their small sizes (< 1 mm) and short lifetimes (< 100 ns). Herein, we report, for the first time, two-dimensional (2D) v_flow measurements of Sn-LPPs ("double-pulse" scheme with a CO₂ laser) for extreme-ultraviolet (EUV) light sources for semiconductor lithography using the collective Thomson scattering technique, which is typically used to measure n_e, T_e, and averaged ionic charge (Z) of plasmas. Inside the EUV source, we observed plasma inflow speed excee

SUBMITTER: Tomita K 

PROVIDER: S-EPMC9892586 | biostudies-literature | 2023 Feb

REPOSITORIES: biostudies-literature