Control of Columnar Grain Microstructure in CSD LaNiO₃ Films.

ABSTRACT: Conductive LaNiO₃ (LNO) films with an ABO₃ perovskite structure deposited on silicon wafers are a promising material for various electronics applications. The creation of a well-defined columnar grain structure in CSD (Chemical Solution Deposition) LNO films is challenging to achieve on an amorphous substrate. Here, we report the formation of columnar grain structure in LNO films deposited on the Si-SiO₂ substrate via layer-by-layer deposition with the control of soft-baking temperature and high temperature annealing time of each deposited layer. The columnar structure is controlled not by typical heterogeneous nucleation on the film/substrate interface, but by the crystallites' coalescence during the successive layers' deposition and annealing. The columna

SUBMITTER: Atanova AV 

PROVIDER: S-EPMC9959992 | biostudies-literature | 2023 Feb

REPOSITORIES: biostudies-literature