Enhanced Wettability, Hardness, and Tunable Optical Properties of SiC_xN_y Coatings Formed by Reactive Magnetron Sputtering.

ABSTRACT: Silicon carbonitride films were deposited on Si (100), Ge (111), and fused silica substrates through the reactive magnetron sputtering of a SiC target in an argon-nitrogen mixture. The deposition was carried out at room temperature and 300 °C and at an RF target power of 50-150 W. An increase in the nitrogen flow rate leads to the formation of bonds between silicon and carbon atoms and nitrogen atoms and to the formation of SiC_xN_y layers. The as-deposited films were analyzed with respect to their element composition, state of chemical bonding, mechanical and optical properties, and wetting behavior. It was found that all synthesized films were amorphous and represented a mixture of SiC_xN_y with free carbon. The films' surfaces were smooth and unif

SUBMITTER: Sulyaeva VS 

PROVIDER: S-EPMC9961253 | biostudies-literature | 2023 Feb

REPOSITORIES: biostudies-literature