One-step printable platform for high-efficiency metasurfaces down to the deep-ultraviolet region.

ABSTRACT: A single-step printable platform for ultraviolet (UV) metasurfaces is introduced to overcome both the scarcity of low-loss UV materials and manufacturing limitations of high cost and low throughput. By dispersing zirconium dioxide (ZrO₂) nanoparticles in a UV-curable resin, ZrO₂ nanoparticle-embedded-resin (nano-PER) is developed as a printable material which has a high refractive index and low extinction coefficient from near-UV to deep-UV. In ZrO₂ nano-PER, the UV-curable resin enables direct pattern transfer and ZrO₂ nanoparticles increase the refractive index of the composite while maintaining a large bandgap. With this concept, UV metasurfaces can be fabricated in a single step by nanoimprint lithography. As a proof of concept, UV metahologr

SUBMITTER: Kim J 

PROVIDER: S-EPMC9992517 | biostudies-literature | 2023 Mar

REPOSITORIES: biostudies-literature