Ontology highlight
ABSTRACT:
SUBMITTER: Nguyen TMH
PROVIDER: S-EPMC10675135 | biostudies-literature | 2023 Nov
REPOSITORIES: biostudies-literature
Nguyen Thi My Huyen TMH Tran Manh Hoang MH Bark Chung Wung CW
Nanomaterials (Basel, Switzerland) 20231120 22
In this study, a highly crystalline and transparent indium-tin-oxide (ITO) thin film was prepared on a quartz substrate via RF sputtering to fabricate an efficient bottom-to-top illuminated electrode for an ultraviolet C (UVC) photodetector. Accordingly, the 26.6 nm thick ITO thin film, which was deposited using the sputtering method followed by post-annealing treatment, exhibited good transparency to deep-UV spectra (67% at a wavelength of 254 nm), along with high electrical conductivity (11.3 ...[more]