Analysis of the Inhomogeneous Growth of Sputtered Black TiO₂ Thin Films.

ABSTRACT: Black titanium dioxide (B-TiO₂) is a highly active photoelectrochemical material compared to pure titanium dioxide due to its increased light absorption properties. Recently, we presented the deposition of thin-film B-TiO₂ using an asymmetric bipolar reactive magnetron sputter process. The resulting samples exhibit excellent photoelectrochemical properties, which can be fine-tuned by varying the process parameters. In this article, results of morphological, electrical, and photoelectrochemical measurements are discussed to better understand the surprisingly high electrochemical activity of the films. In order to study the influence of the dynamic process on film formation, we use static sputtering with a fixed substrate covering the entire chamber area in front of the

SUBMITTER: Berends D 

PROVIDER: S-EPMC10993395 | biostudies-literature | 2024 Apr

REPOSITORIES: biostudies-literature