The effects of oxygen flow ratio on the properties of Ag _x O thin films grown by radio frequency magnetron sputtering.

ABSTRACT: The Ag _x O thin film with various oxygen flow ratios (R[O₂]%) deposited by radio frequency magnetron sputtering (RFM-SPT) has been studied. While adjusting R[O₂]% from 0% to 30%, the Ag _x O thin film transitioned from metal to semiconductor and/or insulator with different transparent appearances on the surface observed using X-ray diffraction (XRD) and transmittance measurement. At high oxygen flow ratios, the Ag _x O film is multi-phased as a mixture of Ag^(II)O and Ag₂ ^(III)O₃. In addition, the work function (ϕ) of those samples changes from 4.7 eV to 5.6 eV as measured by photoelectron yield spectroscopy (PYS). The compositional and chemical state ch

SUBMITTER: Liu X 

PROVIDER: S-EPMC11264336 | biostudies-literature | 2024 Jul

REPOSITORIES: biostudies-literature