Conductive single-phase SrMoO₃ epitaxial films synthesized in pure Ar ambience via plasma-assisted radio frequency sputtering.

ABSTRACT: The cubic perovskite SrMoO₃ with a paramagnetic ground state and remarkably low room-temperature resistivity has been considered as a suitable candidate for the new-era oxide-based technology. However, the difficulty of preparing single-phase SrMoO₃ thin films by hydrogen-free sputtering has hindered their practical use, especially due to the formation of thermodynamically favorable SrMoO₄ impurity. In this work, we developed a radio frequency sputtering technology enabling the reduction reaction and achieved conductive epitaxial SrMoO₃ films with pure phase from a SrMoO₄ target in a hydrogen-free, pure argon environment. We demonstrated the significance of controlling the target-to-substrate distance (TSD) on the synthesis of SrMoO

SUBMITTER: Roy-Chowdhury M 

PROVIDER: S-EPMC11318490 | biostudies-literature | 2024

REPOSITORIES: biostudies-literature