Morphology adjustable microlens array fabricated by single spatially modulated femtosecond pulse.

ABSTRACT: Silica microlens arrays (MLAs) with multiple numerical-apertures (NAs) have high thermal and mechanical stability, and have potential application prospects in 3D display and rapid detection. However, it is still a challenge to rapidly fabricate silica MLAs with a larger range of NAs and how to obtain multiple NAs in the same aperture diameter. Here, a wet etching assisted spatially modulated femtosecond laser pulse fabricating technology is proposed. In this technology, Gaussian laser pulse is modulated in the axial direction to create a pulse with a large aspect ratio, which is used to modify the silica to obtain a longer modification distance than traditional technology. After that, a microlens with a larger NA can be obtained by etching, and the NA variable range can be up to 0.06-0.65,

SUBMITTER: Liu Y 

PROVIDER: S-EPMC11501908 | biostudies-literature | 2022 Jan

REPOSITORIES: biostudies-literature