Fourier ptychographic coherence scanning interferometry for 3D morphology of high aspect ratio and composite micro-trenches.

ABSTRACT: Non-destructive and accurate characterization of high aspect ratio (HAR) and composite micro-trenches is critical for advanced microfabrication but remains a major challenge. Conventional coherence scanning interferometry (CSI), while widely adopted, suffers from low signal-to-noise ratio (SNR) and limited lateral resolution when applied to HAR and composite microstructures. Here, we present Fourier ptychographic coherence scanning interferometry (FP-CSI), the first transmissive CSI modality that integrates the aperture synthesis strategy of Fourier ptychographic microscopy with the quantitative phase-resolved capability of interferometry. FP-CSI enables robust three-dimensional morphology reconstruction with enhanced SNR and improved lateral resolution, without reliance on iterative phase

SUBMITTER: Li Y 

PROVIDER: S-EPMC12852827 | biostudies-literature | 2026 Jan

REPOSITORIES: biostudies-literature