High sensitivity SAW hydrogen gas sensor based on thermal conductivity effect.

ABSTRACT: Wide-range and high-sensitivity hydrogen sensors are critically important for hydrogen safety in aerospace and advanced transportation sectors. This work demonstrates a thermal-conductivity surface acoustic wave (SAW) based sensor to achieve high sensitivity hydrogen sensing. By integrating thermal balance and acoustic wave equations, a precise mechanistic model elucidating the structure-activity relationships among gas flow rate, operating temperature, and MEMS architecture in determining sensing sensitivity is constructed. Guided by this model, the SAW hydrogen sensor with on-chip microheater integration was developed. Furthermore, a highly integrated SAW hydrogen sensing system with ultra-low baseline noise (<30 µV) was constructed for performance evaluation. Leveraging the exceptional

SUBMITTER: Cui B 

PROVIDER: S-EPMC12946372 | biostudies-literature | 2026 Feb

REPOSITORIES: biostudies-literature