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Wafer-scale high-resolution patterning of reduced graphene oxide films for detection of low concentration biomarkers in plasma.


ABSTRACT: Given that reduced graphene oxide (rGO)-based biosensors allow disposable and repeatable biomarker detection at the point of care, we developed a wafer-scale rGO patterning method with mass productivity, uniformity, and high resolution by conventional micro-electro-mechanical systems (MEMS) techniques. Various rGO patterns were demonstrated with dimensions ranging from 5 μm up to several hundred μm. Manufacture of these patterns was accomplished through the optimization of dry etching conditions. The axis-homogeneity and uniformity were also measured to verify the uniform patternability in 4-inch wafer with dry etching. Over 66.2% of uniform rGO patterns, which have deviation of resistance within range of ±10%, formed the entire wafer. We selected amyloid beta (Aβ) peptides in the plasma o

SUBMITTER: Kim J 

PROVIDER: S-EPMC4978995 | biostudies-literature | 2016 Aug

REPOSITORIES: biostudies-literature