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Scalable fabrication of sub-10 nm polymer nanopores for DNA analysis.

ABSTRACT: We present the first fabrication of sub-10 nm nanopores in freestanding polymer membranes via a simple, cost-effective, high-throughput but deterministic fabrication method. Nanopores in the range of 10 nm were initially produced via a single-step nanoimprinting process, which was further reduced to sub-10 nm pores via a post-NIL polymer reflow process. The low shrinkage rate of 2.7 nm/min obtained under the conditions used for the reflow process was the key to achieving sub-10 nm pores with a controllable pore size. The fabricated SU-8 nanopore membranes were successfully employed for transient current measurements during the translocation of DNA molecules through the nanopores.

SUBMITTER: Choi J

PROVIDER: S-EPMC6453903 | biostudies-literature | 2019

REPOSITORIES: biostudies-literature

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Scalable fabrication of sub-10 nm polymer nanopores for DNA analysis.

Choi Junseo J Lee Charles C CC Park Sunggook S

Microsystems & nanoengineering 20190408

We present the first fabrication of sub-10 nm nanopores in freestanding polymer membranes via a simple, cost-effective, high-throughput but deterministic fabrication method. Nanopores in the range of 10 nm were initially produced via a single-step nanoimprinting process, which was further reduced to sub-10 nm pores via a post-NIL polymer reflow process. The low shrinkage rate of 2.7 nm/min obtained under the conditions used for the reflow process was the key to achieving sub-10 nm pores with a c ...[more]

PMID: 31057939

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