Heterogeneous optoelectronic characteristics of Si micropillar arrays fabricated by metal-assisted chemical etching.
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ABSTRACT: Recent progress achieved in metal-assisted chemical etching (MACE) has enabled the production of high-quality micropillar arrays for various optoelectronic applications. Si micropillars produced by MACE often show a porous Si/SiOx shell on crystalline pillar cores introduced by local electrochemical reactions. In this paper, we report the distinct optoelectronic characteristics of the porous Si/SiOx shell correlated to their chemical compositions. Local photoluminescent (PL) images obtained with an immersion oil objective lens in confocal microscopy show a red emission peak (≈ 650 nm) along the perimeter of the pillars that is threefold stronger compared to their center. On the basis of our analysis, we find an unexpected PL increase (≈ 540 nm) at the oil/shell interf
SUBMITTER: Qian Y
PROVIDER: S-EPMC7530667 | biostudies-literature | 2020 Oct
REPOSITORIES: biostudies-literature
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