Dataset Information

Reaction of BCl₃ with H- and Cl-terminated Si(1 0 0) as a pathway for selective, monolayer doping through wet chemistry.

ABSTRACT: The reaction of boron trichloride with the H and Cl-terminated Si(100) surfaces was investigated to understand the interaction of this molecule with the surface for designing wet-chemistry based silicon surface doping processes using a carbon- and oxygen-free precursor. The process was followed with X-ray photoelectron spectroscopy (XPS). Within the reaction conditions investigated, the reaction is highly effective on Cl-Si(100) for temperatures below 70°C, at which point both surfaces react with BCl₃. The XPS investigation followed the formation of a B 1s peak at 193.5 eV corresponding to (B-O)_x species. Even the briefest exposure to ambient conditions lead to hydroxylation of surface borochloride species. However, the Si 2p signature at 102 eV allowed for a confirma

SUBMITTER: Silva-Quinones D

PROVIDER: S-EPMC7583461 | biostudies-literature | 2020 Dec

REPOSITORIES: biostudies-literature

ACCESS DATA

Dataset Information

Reaction of BCl₃ with H- and Cl-terminated Si(1 0 0) as a pathway for selective, monolayer doping through wet chemistry.

OmicsDI is part of the ELIXIR infrastructure

Tweets

Dataset Information

Reaction of BCl3 with H- and Cl-terminated Si(1 0 0) as a pathway for selective, monolayer doping through wet chemistry.

OmicsDI is part of the ELIXIR infrastructure

Tweets

Reaction of BCl₃ with H- and Cl-terminated Si(1 0 0) as a pathway for selective, monolayer doping through wet chemistry.