Ontology highlight
ABSTRACT:
SUBMITTER: Zaiter A
PROVIDER: S-EPMC9736891 | biostudies-literature | 2022 Dec
REPOSITORIES: biostudies-literature
Zaiter Aly A Michon Adrien A Nemoz Maud M Courville Aimeric A Vennéguès Philippe P Ottapilakkal Vishnu V Vuong Phuong P Sundaram Suresh S Ougazzaden Abdallah A Brault Julien J
Materials (Basel, Switzerland) 20221202 23
In this study, AlN epilayers were grown by ammonia-assisted molecular beam epitaxy on 3 nm h-BN grown on c-sapphire substrates. Their structural properties were investigated by comparing as-grown and postgrowth annealed layers. The role of annealing on the crystalline quality and surface morphology was studied as a function of AlN thickness and the annealing duration and temperature. Optimum annealing conditions were identified. The results of X-ray diffraction showed that optimization of the an ...[more]