Efficient multi-barrier thin film encapsulation of OLED using alternating Al₂O₃ and polymer layers.

ABSTRACT: Organic optoelectronic devices, especially for OLEDs, are extremely susceptibility to water vapor and oxygen which limit their widespread commercialization. In order to extend the shelf-lifetime of devices, thin film encapsulation is the most promising and challenging encapsulation process. In this study, dyad-style multilayer encapsulation structures based on alternating Al₂O₃ layer and parylene C have been discussed as gas diffusion barriers, in which dense and pinhole-free Al₂O₃ films were grown by atomic layer deposition (ALD) and flexible parylene C layers were deposited by chemical vapor deposition (CVD). We found the particle in ALD deposited Al₂O₃ films process is the key killer to barrier property. The thickness of

SUBMITTER: Wu J 

PROVIDER: S-EPMC9078233 | biostudies-literature | 2018 Feb

REPOSITORIES: biostudies-literature