Large-scale vivid metasurface color printing using advanced 12-in. immersion photolithography.

ABSTRACT: Nanostructures exhibiting optical resonances (so-called nanoantennas) have strong potential for applications in color printing and filtering with sub-wavelength resolution. While small scale demonstrations of these systems are interesting as a proof-of-concept, their large scale and volume fabrication requires deeper analysis and further development for industrial adoption. Here, we evaluate the color quality produced by large size nanoantenna arrays fabricated on a 12-in. wafer using deep UV immersion photolithography and dry etching processes. The color reproduction and quality are analyzed in context of the CIE color diagram, showing that a vivid and vibrant color palette, almost fully covering the sRGB color space, can be obtained with this mass-manufacturing-ready fabrication process.

SUBMITTER: Khaidarov E 

PROVIDER: S-EPMC9388524 | biostudies-literature | 2022 Aug

REPOSITORIES: biostudies-literature